Sensitivity of MIS Capacitors with Palladium Electrode to Aromatic Nitro Compounds Vapor

Keywords: MIS capacitors, gas concentration, ppb-level gas sensor, pyrolysis, nitrogen dioxide.

Abstract

The temperature and time modes of the high-energy aromatic nitro compound vapor pyrolysis have been studied. The optimal conditions for reliable concentration measurement of gas-phase decomposition products of nitro compound molecules using MIS capacitors based on palladium-dielectric-silicon structures were determined. It has been established that the sensitivity of MIS sensors to nitroaromatic compound vapor appears when a gaseous sample is exposed to a temperature of 400°C and reaches a maximum at 500 – 550°C with an average duration of vapor heating of 1 s.

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Published
2022-06-06
How to Cite
Etrekova, M. O., Samotaev, N. N., Litvinov, A. V., Mikhailov, A. A., & Podlepetsky, B. I. (2022). Sensitivity of MIS Capacitors with Palladium Electrode to Aromatic Nitro Compounds Vapor. Chemical Safety Science, 6(1), 163 - 172. https://doi.org/10.25514/CHS.2022.1.21010
Section
Indication and identification of hazardous substances